TY - JOUR
T1 - Practical spatial resolution of electron energy loss spectroscopy in aberration corrected scanning transmission electron microscopy
AU - Shah, A. B.
AU - Ramasse, Q. M.
AU - Wen, J. G.
AU - Bhattacharya, A.
AU - Zuo, J. M.
N1 - Funding Information:
We thank Xiaofang Zhai and James Eckstein for growing the LMO-STO and SVO-STO samples, Jochen Manhart and Scott Chambers for providing the LAO–STO sample, and Ivan Petrov for valuable discussions. Research in this manuscript is supported by the U.S. Department of Energy, Division of Materials Sciences under grant DEFG02-91ER45439 and Argonne National Laboratory under the U.S. Department of Energy grant DE-AC02-06CH11357 Digital Synthesis FWP. Microscopy was carried out at the Frederick Seitz Materials Research Laboratory Central Facilities, University of Illinois, which is partially supported by the U.S. Department of Energy under grants DE-FG02-07ER46453 and DE-FG02-07ER46471, and the National Center for Electron Microscopy, Lawrence Berkeley Lab, which is supported by the U.S. Department of Energy under grant DE-AC02-05CH11231.
PY - 2011/8
Y1 - 2011/8
N2 - The resolution of electron energy loss spectroscopy (EELS) is limited by delocalization of inelastic electron scattering rather than probe size in an aberration corrected scanning transmission electron microscope (STEM). In this study, we present an experimental quantification of EELS spatial resolution using chemically modulated 2×(LaMnO3)/2×(SrTiO3) and 2×(SrVO3)/2×(SrTiO3) superlattices by measuring the full width at half maxima (FWHM) of integrated Ti M2,3, Ti L2,3, V L2,3, Mn L2,3, La N4,5, La N2,3 La M4,5 and Sr L3 edges over the superlattices. The EELS signals recorded using large collection angles are peaked at atomic columns. The FWHM of the EELS profile, obtained by curve-fitting, reveals a systematic trend with the energy loss for the Ti, V, and Mn edges. However, the experimental FWHM of the Sr and La edges deviates significantly from the observed experimental tendency.
AB - The resolution of electron energy loss spectroscopy (EELS) is limited by delocalization of inelastic electron scattering rather than probe size in an aberration corrected scanning transmission electron microscope (STEM). In this study, we present an experimental quantification of EELS spatial resolution using chemically modulated 2×(LaMnO3)/2×(SrTiO3) and 2×(SrVO3)/2×(SrTiO3) superlattices by measuring the full width at half maxima (FWHM) of integrated Ti M2,3, Ti L2,3, V L2,3, Mn L2,3, La N4,5, La N2,3 La M4,5 and Sr L3 edges over the superlattices. The EELS signals recorded using large collection angles are peaked at atomic columns. The FWHM of the EELS profile, obtained by curve-fitting, reveals a systematic trend with the energy loss for the Ti, V, and Mn edges. However, the experimental FWHM of the Sr and La edges deviates significantly from the observed experimental tendency.
KW - Aberration correction
KW - Electron energy loss spectroscopy
KW - Oxide interfaces
KW - Scanning transmission electron microscopy
KW - Superlattice
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U2 - 10.1016/j.micron.2010.12.008
DO - 10.1016/j.micron.2010.12.008
M3 - Article
C2 - 21376607
AN - SCOPUS:79955617634
SN - 0968-4328
VL - 42
SP - 539
EP - 546
JO - Micron
JF - Micron
IS - 6
ER -