Abstract
This paper presents a framework for investigating the power flow angle (PFA) of acoustic waves in thin-film lithium niobate (LiNbO3). Four-port acoustic delay line testbeds are implemented with different gap lengths and in-plane orientations for accurately extracting PFA of fundamental symmetric (S0) mode in X-cut LiNbO3. The PFA extraction method is readily extendable to other acoustic modes and materials. The proposed testbeds can also be used as miniature radio frequency (RF) directional couplers. It also offers the possibility of implementing novel acoustic elements in thin-film LiNbO3.
Original language | English (US) |
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Journal | IEEE International Ultrasonics Symposium, IUS |
DOIs | |
State | Published - 2021 |
Event | 2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, China Duration: Sep 11 2011 → Sep 16 2011 |
Keywords
- Lamb wave
- acoustic delay line
- lithium niobate
- piezoelectric devices
- power flow angle
- thin-film devices
ASJC Scopus subject areas
- Acoustics and Ultrasonics