Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation

Ming Huang Li, Chao Yu Chen, Ruochen Lu, Yansong Yang, Tao Wu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, we demonstrate, for the first time, a micro-oven-integrated 170 MHz microelectromechanical systems (MEMS) resonator array implemented in a 36°-rotated-Y-Cut lithium niobate on silicon oxide (LN-OX) platform using the fundamental shear horizontal (SH0) mode. The array not only attains a high heating efficiency of 33 K/mW but also exhibits a promising electromechanical coupling coefficient ({k-{t}}^{2}) of 9.6%, a quality factor (Q) of 1360, a resulting figure of merit (\text{FoM}={k-{t}}^{2}\cdot Q) of 130, and a passively-compensated temperature coefficient of frequency (TCF) of 13.8 ppm/K. The design of the individual resonator in the array, namely a weighted 3-electrode resonator with embedded heaters on the suspended busbars, is the key to achieving the high heating efficiency while mitigating spurious modes across a wide frequency span (100-300 MHz).

Original languageEnglish (US)
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages911-914
Number of pages4
ISBN (Electronic)9781728116105
DOIs
StatePublished - Jan 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: Jan 27 2019Jan 31 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period1/27/191/31/19

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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