Porous device for optical and electronic applications and method of fabricating the porous device

Paul V Braun (Inventor), Varun B Verma (Inventor), Victor C Elarde (Inventor), Erik C Nelson (Inventor), James J Coleman (Inventor)

Research output: Patent

Abstract

A porous device for optical and electronic applications comprises a single crystal substrate and a porous single crystal structure epitaxially disposed on the substrate, where the porous single crystal structure includes a three-dimensional arrangement of pores. The three-dimensional arrangement may also be a periodic arrangement. A method of fabricating such a device includes forming a scaffold comprising interconnected elements on a single crystal substrate, where the interconnected elements are separated by voids. A first material is grown epitaxially on the substrate and into the voids. The scaffold is then removed to obtain a porous single crystal structure epitaxially disposed on the substrate, where the single crystal structure comprises the first material and includes pores defined by the interconnected elements of the scaffold.
Original languageEnglish (US)
U.S. patent number8222988
StatePublished - Jul 17 2012

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