PLATOP: A novel planarized trench isolation and field oxide formation using poly-silicon

Keyphrases

• Trench Isolation 100%
• Oxide Formation 100%
• Polysilicon 100%
• Field Oxide 100%
• Isolation Oxide 100%
• Isolation Method 40%
• High Performance 20%
• Lithography 20%
• Submicron 20%
• Etching Process 20%
• Deep Trench 20%
• Encroachment 20%
• Active Area 20%
• Field Regions 20%
• Shallow Trench 20%
• Active Oxidation 20%

Material Science

• Silicon 100%
• Oxide Compound 100%
• Oxidation Reaction 25%
• Lithography 25%