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Plasma-assisted cleaning by metastable-atom neutralization
Wayne M. Lytle
,
Daniel Andruczyk
,
David N. Ruzic
Nuclear, Plasma, and Radiological Engineering
Micro and Nanotechnology Lab
Office of the Provost and Executive Vice Chancellor
Electrical and Computer Engineering
Biomedical and Translational Sciences
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peer-review
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Keyphrases
Hydrocarbons
100%
Plasma-assisted
100%
Metastable Atoms
100%
Cleaning Efficiency
60%
Helium Metastables
60%
Metastable Density
60%
Electric Field (E-field)
40%
Plasma Sheath
40%
Neutralization Techniques
40%
Desorption
20%
Surface Bonding
20%
Chain Scission
20%
Photomask
20%
Extreme Ultraviolet
20%
Density Field
20%
Semiconductor Manufacturing
20%
Surrounding Structures
20%
Carbon Forms
20%
Carbon Film
20%
Process Chamber
20%
Metastable Helium
20%
Carbon Contamination
20%
Electric Field Calculation
20%
Helium Metastable Atoms
20%
Lithographic Materials
20%
Physics
Metastable Atom
100%
Blood Plasma
100%
Electric Field
60%
Plasma Sheaths
40%
Desorption
20%