@inproceedings{ab5d735d57c747e2801bf18cf43302d6,
title = "Piezoresistive microcantilevers from ultrananocrystalline diamond",
abstract = " This paper reports the temperature-dependant electrical resistivity and piezoresistive characteristics of boron-doped ultrananocyrstalline diamond (UNCD), and the fabrication of piezoresistive microcantilevers using boron-doped and undoped UNCD. The devices consist of 1 μm thick doped UNCD on either 1 or 2 μm thick undoped UNCD. Over the temperature range 25-200 °C, the doped UNCD has a temperature coefficient of electrical resistance of-1.4 × 10 -3 °C -1 . The doped UNCD exhibits a significant piezoresistive effect with gauge factor of 7.5 and a piezoresistive coefficient of 8.12 × 10 -12 Pa -1 at 25 °C. The piezoresistive properties of UNCD are constant over the temperature range 25-200 °C. Microcantilevers of length 300 μm have deflection sensitivity of 0.186 mΩ/Ω per µm of cantilever end deflection. These measurements of electrical and piezoresistive properties of doped UNCD could aid the design of future diamond microsystems.",
author = "Privorotskaya, {Natalya L.} and Hongjun Zeng and Carlisle, {John A.} and Rashid Bashir and King, {William P.}",
note = "Publisher Copyright: {\textcopyright} 2010TRF.; 2010 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 06-06-2010 Through 10-06-2010",
year = "2010",
doi = "10.1109/JMEMS.2010.2067201",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "250--253",
editor = "Monk, {David J.} and Turner, {Kimberly L.}",
booktitle = "2010 Solid-State Sensors, Actuators, and Microsystems Workshop",
}