Physical Modeling of Monolithic Self-Rolled-Up Microtube Interdigital Capacitors

Xiang Luo, Zhendong Yang, Mark Kraman, Lei Sang, Yong Zhang, Xiuling Li, Wen Huang

Research output: Contribution to journalArticlepeer-review

Abstract

This article presents a physical model for monolithic self-rolled-up microtube interdigital capacitors and elaborates their working mechanisms in comparison to on-chip planar interdigital capacitors. Besides the high-frequency phenomena such as the skin effect in thin, wide metal films, the model accounts for the complexities resulting from all possible 3-D electrode configurations, such as the inner diameter-dependent overlapping capacitances and edge capacitances between electrodes, as well as parasitic inductances within the rolled-up structure between the fingers, for integer and noninteger number of turns. The model is validated by the measured results of fabricated self-rolled-up membrane (S-RuM) interdigital capacitors over a wide range of layout and process parameters. This fully enables the structural design optimization for electrical performance of this 3-D device architecture.

Original languageEnglish (US)
Pages (from-to)359-367
Number of pages9
JournalIEEE Transactions on Components, Packaging and Manufacturing Technology
Volume12
Issue number2
DOIs
StatePublished - Feb 1 2022
Externally publishedYes

Keywords

  • Capacitor model
  • microtube interdigital capacitors
  • on-chip interdigital capacitors
  • self-rolled-up membrane (S-RuM)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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