TY - GEN
T1 - Photonic MEMS for NIR in-situ gas detection and identification
AU - Bond, Tiziana C.
AU - Cole, Garrett D.
AU - Goddard, Lynford L.
AU - Behymer, Elaine M.
PY - 2007
Y1 - 2007
N2 - We report on a novel sensing technique combining photonics and microelectromechanical systems (MEMS) for the detection and monitoring of gas emissions in environmental, medical, and industrial applications. We discuss how MEMS-tunable vertical-cavity surface-emitting lasers (VCSELs) can be exploited for in-situ detection and NIR spectroscopy of several gases, such as O 2, N2O, CH4, HF, HCl, etc., with estimated sensitivities between 0.1 and 20 ppm on footprints ≪ 10-3 mm 3. The VCSELs can be electrostatically tuned with a continuous wavelength shift up to 20 nm, allowing for unambiguous NIR signature determination. Selective concentration analysis in heterogeneous gas compositions is enabled, thus paving the way to an integrated optical platform for multiplexed gas identification by bandgap and device engineering. We will discuss here, in particular, our efforts on the development of a 760 nm AlGaAs-based tunable VCSEL for O2 detection.
AB - We report on a novel sensing technique combining photonics and microelectromechanical systems (MEMS) for the detection and monitoring of gas emissions in environmental, medical, and industrial applications. We discuss how MEMS-tunable vertical-cavity surface-emitting lasers (VCSELs) can be exploited for in-situ detection and NIR spectroscopy of several gases, such as O 2, N2O, CH4, HF, HCl, etc., with estimated sensitivities between 0.1 and 20 ppm on footprints ≪ 10-3 mm 3. The VCSELs can be electrostatically tuned with a continuous wavelength shift up to 20 nm, allowing for unambiguous NIR signature determination. Selective concentration analysis in heterogeneous gas compositions is enabled, thus paving the way to an integrated optical platform for multiplexed gas identification by bandgap and device engineering. We will discuss here, in particular, our efforts on the development of a 760 nm AlGaAs-based tunable VCSEL for O2 detection.
UR - http://www.scopus.com/inward/record.url?scp=48349091108&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=48349091108&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2007.4388666
DO - 10.1109/ICSENS.2007.4388666
M3 - Conference contribution
AN - SCOPUS:48349091108
SN - 1424412617
SN - 9781424412617
T3 - Proceedings of IEEE Sensors
SP - 1368
EP - 1371
BT - The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
T2 - 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Y2 - 28 October 2007 through 31 October 2007
ER -