Photonic MEMS for NIR in-situ gas detection and identification

Tiziana C. Bond, Garrett D. Cole, Lynford L. Goddard, Elaine M. Behymer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on a novel sensing technique combining photonics and microelectromechanical systems (MEMS) for the detection and monitoring of gas emissions in environmental, medical, and industrial applications. We discuss how MEMS-tunable vertical-cavity surface-emitting lasers (VCSELs) can be exploited for in-situ detection and NIR spectroscopy of several gases, such as O 2, N2O, CH4, HF, HCl, etc., with estimated sensitivities between 0.1 and 20 ppm on footprints ≪ 10-3 mm 3. The VCSELs can be electrostatically tuned with a continuous wavelength shift up to 20 nm, allowing for unambiguous NIR signature determination. Selective concentration analysis in heterogeneous gas compositions is enabled, thus paving the way to an integrated optical platform for multiplexed gas identification by bandgap and device engineering. We will discuss here, in particular, our efforts on the development of a 760 nm AlGaAs-based tunable VCSEL for O2 detection.

Original languageEnglish (US)
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Pages1368-1371
Number of pages4
DOIs
StatePublished - Dec 1 2007
Externally publishedYes
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: Oct 28 2007Oct 31 2007

Publication series

NameProceedings of IEEE Sensors

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
CountryUnited States
CityAtlanta, GA
Period10/28/0710/31/07

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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