@inproceedings{b69c3c8446c24faf8a6dc4ea1ab27324,
title = "Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure",
abstract = "This paper reports a method to fabricate photonic crystal nickel and alumina micromechanical devices having three dimensional (3D) inverse opal microstructure. The 3D photonic crystal microstructure is fabricated using the polystyrene opals self-assembly process on gold coated silicon chips, followed by nickel electroplating. The volume fraction of these 3D nickel micromechanical devices can be controlled over the range 10% to 80%. The resulting nickel structure can be coated with an alumina shell and then sacrificed, to produce an alumina shell devices with volume fraction near 1%. To our knowledge, these are the first micromechanical devices made from a 3D inverse opal structure.",
author = "Zhenting Dai and Xindi Yu and Huigang Zhang and Taewan Kim and Braun, {Paul V.} and King, {William P.}",
note = "Copyright: Copyright 2014 Elsevier B.V., All rights reserved.",
year = "2011",
doi = "10.1109/MEMSYS.2011.5734423",
language = "English (US)",
isbn = "9781424496327",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "308--311",
booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011",
address = "United States",
}