Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure

Zhenting Dai, Xindi Yu, Huigang Zhang, Taewan Kim, Paul V. Braun, William P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a method to fabricate photonic crystal nickel and alumina micromechanical devices having three dimensional (3D) inverse opal microstructure. The 3D photonic crystal microstructure is fabricated using the polystyrene opals self-assembly process on gold coated silicon chips, followed by nickel electroplating. The volume fraction of these 3D nickel micromechanical devices can be controlled over the range 10% to 80%. The resulting nickel structure can be coated with an alumina shell and then sacrificed, to produce an alumina shell devices with volume fraction near 1%. To our knowledge, these are the first micromechanical devices made from a 3D inverse opal structure.

Original languageEnglish (US)
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages308-311
Number of pages4
ISBN (Print)9781424496327
DOIs
StatePublished - 2011

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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