Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure

Zhenting Dai; Xindi Yu; Huigang Zhang; Taewan Kim; Paul V. Braun; William P. King

doi:10.1109/MEMSYS.2011.5734423

Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure

Zhenting Dai, Xindi Yu, Huigang Zhang, Taewan Kim, Paul V. Braun, William P. King

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports a method to fabricate photonic crystal nickel and alumina micromechanical devices having three dimensional (3D) inverse opal microstructure. The 3D photonic crystal microstructure is fabricated using the polystyrene opals self-assembly process on gold coated silicon chips, followed by nickel electroplating. The volume fraction of these 3D nickel micromechanical devices can be controlled over the range 10% to 80%. The resulting nickel structure can be coated with an alumina shell and then sacrificed, to produce an alumina shell devices with volume fraction near 1%. To our knowledge, these are the first micromechanical devices made from a 3D inverse opal structure.

Original language	English (US)
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	308-311
Number of pages	4
ISBN (Print)	9781424496327
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734423
State	Published - 2011

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/MEMSYS.2011.5734423

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Dai, Z., Yu, X., Zhang, H., Kim, T., Braun, P. V., & King, W. P. (2011). Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 308-311). Article 5734423 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2011.5734423

Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure. / Dai, Zhenting; Yu, Xindi; Zhang, Huigang et al.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. Institute of Electrical and Electronics Engineers Inc., 2011. p. 308-311 5734423 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Dai, Z, Yu, X, Zhang, H, Kim, T, Braun, PV & King, WP 2011, Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734423, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 308-311. https://doi.org/10.1109/MEMSYS.2011.5734423

Dai Z, Yu X, Zhang H, Kim T, Braun PV , King WP. Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. Institute of Electrical and Electronics Engineers Inc. 2011. p. 308-311. 5734423. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2011.5734423

Dai, Zhenting ; Yu, Xindi ; Zhang, Huigang et al. / Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. Institute of Electrical and Electronics Engineers Inc., 2011. pp. 308-311 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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AB - This paper reports a method to fabricate photonic crystal nickel and alumina micromechanical devices having three dimensional (3D) inverse opal microstructure. The 3D photonic crystal microstructure is fabricated using the polystyrene opals self-assembly process on gold coated silicon chips, followed by nickel electroplating. The volume fraction of these 3D nickel micromechanical devices can be controlled over the range 10% to 80%. The resulting nickel structure can be coated with an alumina shell and then sacrificed, to produce an alumina shell devices with volume fraction near 1%. To our knowledge, these are the first micromechanical devices made from a 3D inverse opal structure.

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Photonic crystal nickel and aluminum oxide micromechanical devcies having 3D inverse opal microstructure

Abstract

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