Photoluminescence and cathodoluminescence from nanostructured silicon surface

Manas Ranjan Gartia, Yi Chen, Gang Logan Liu

Research output: Contribution to journalArticlepeer-review


We report the photoluminescence (PL) and cathodoluminescence (CL) study of nanostructured poly-crystalline silicon surface fabricated by lithography-less, reactive ion etching process. Photoluminescence in visible range at room temperature with peak position between 630 nm and 720 nm is observed without any oxidation or annealing steps. X-ray photoemission (XPS) and Auger electron spectroscopy (AES) revealed the presence of silicon oxide. The observed cathodoluminescence in green and red regions of the visible spectrum are due to nano-scaled tips and their coating with nonstoichiometric silicon oxide.

Original languageEnglish (US)
Article number151902
JournalApplied Physics Letters
Issue number15
StatePublished - Oct 10 2011
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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