Abstract
The performance of Si pyramidal microdischarge photodetectors were characterized in the visible and near-infrared with near-atmospheric Ne plasmas. The inverted pyramid cavities were wet etched into the silicon and were surrounded by a dielectric layer consisting of silicon nitride and polyimide, having a total thickness of ∼ 10 μm. The individual 100×100 μm 2 and 50×50μm 2 devices were tested in a vacuum chamber that was evacuated below 1×10 -6 Torr and backfilled with research grade Ne to a pressure of 500 and 800 Torr. The absolute spectral response of the microdischarge-based photodetectors was also investigated.
| Original language | English (US) |
|---|---|
| Article number | MP5 |
| Pages (from-to) | 154-155 |
| Number of pages | 2 |
| Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
| Volume | 1 |
| State | Published - 2004 |
| Event | 2004 IEEE LEOS Annual Meeting Conference Proceedings, LEOS 2004 - Rio Grande, Puerto Rico Duration: Nov 7 2004 → Nov 11 2004 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering