Original languageEnglish (US)
Title of host publicationThin Film Processes II
PublisherElsevier Inc.
Pages443-500
Number of pages58
ISBN (Print)9780080524214
DOIs
StatePublished - Dec 2 2012

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Vapor deposition

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Eden, J. G. (2012). Photochemical Vapor Deposition. In Thin Film Processes II (pp. 443-500). Elsevier Inc.. https://doi.org/10.1016/B978-0-08-052421-4.50013-7

Photochemical Vapor Deposition. / Eden, James Gary.

Thin Film Processes II. Elsevier Inc., 2012. p. 443-500.

Research output: Chapter in Book/Report/Conference proceedingChapter

Eden, JG 2012, Photochemical Vapor Deposition. in Thin Film Processes II. Elsevier Inc., pp. 443-500. https://doi.org/10.1016/B978-0-08-052421-4.50013-7
Eden JG. Photochemical Vapor Deposition. In Thin Film Processes II. Elsevier Inc. 2012. p. 443-500 https://doi.org/10.1016/B978-0-08-052421-4.50013-7
Eden, James Gary. / Photochemical Vapor Deposition. Thin Film Processes II. Elsevier Inc., 2012. pp. 443-500
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