Photochemical Vapor Deposition

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish (US)
Title of host publicationThin Film Processes II
PublisherElsevier Inc.
Pages443-500
Number of pages58
ISBN (Print)9780080524214
DOIs
StatePublished - Jan 1 1991

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Eden, J. G. (1991). Photochemical Vapor Deposition. In Thin Film Processes II (pp. 443-500). Elsevier Inc.. https://doi.org/10.1016/B978-0-08-052421-4.50013-7