| Original language | English (US) |
|---|---|
| Title of host publication | Thin Film Processes II |
| Publisher | Elsevier Inc. |
| Pages | 443-500 |
| Number of pages | 58 |
| ISBN (Print) | 9780080524214 |
| DOIs | |
| State | Published - 1991 |
ASJC Scopus subject areas
- General Engineering
Photochemical Vapor Deposition
Research output: Chapter in Book/Report/Conference proceeding › Chapter