Abstract
A wide variety of semiconductor and metal films have recently been grown, doped, or etched by laser photochemical processes. While stillearly in its development, laser-driven processing of semiconductor devices appears promising as a supplement to existing processing techniques and particularly in the fabrication of III-V compound and custom devices.
| Original language | English (US) |
|---|---|
| Title of host publication | Electronic and Potonic Circuits and Devices |
| Publisher | Wiley-IEEE Press |
| Pages | 93-99 |
| Number of pages | 7 |
| ISBN (Electronic) | 9780470544532 |
| ISBN (Print) | 0780334965, 9780780334960 |
| DOIs | |
| State | Published - Jan 1 1998 |
| Externally published | Yes |
ASJC Scopus subject areas
- General Physics and Astronomy