Photochemical processing of semiconductors: New applications for visible and ultraviolet lasers

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

A wide variety of semiconductor and metal films have recently been grown, doped, or etched by laser photochemical processes. While stillearly in its development, laser-driven processing of semiconductor devices appears promising as a supplement to existing processing techniques and particularly in the fabrication of III-V compound and custom devices.

Original languageEnglish (US)
Title of host publicationElectronic and Potonic Circuits and Devices
PublisherWiley-IEEE Press
Pages93-99
Number of pages7
ISBN (Electronic)9780470544532
ISBN (Print)0780334965, 9780780334960
DOIs
StatePublished - Jan 1 1998
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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