A wide variety of semiconductor and metal films have recently been grown, doped, or etched by laser photochemical processes. While stillearly in its development, laser-driven processing of semiconductor devices appears promising as a supplement to existing processing techniques and particularly in the fabrication of III-V compound and custom devices.
|Original language||English (US)|
|Title of host publication||Electronic and Potonic Circuits and Devices|
|Number of pages||7|
|ISBN (Print)||0780334965, 9780780334960|
|State||Published - Jan 1 1998|
ASJC Scopus subject areas
- Physics and Astronomy(all)