Photochemical Processing of Semiconductors: New Applications for Visible and Ultraviolet Lasers

J. Gary Eden

doi:10.1109/MCD.1986.6311766

Photochemical Processing of Semiconductors: New Applications for Visible and Ultraviolet Lasers

Research output: Contribution to journal › Article › peer-review

Abstract

A wide variety of semiconductor and metal films have recently been grown, doped, or etched by laser photochemical processes. While still early in its development, laser-driven processing of semiconductor devices appears promising as a supplement to existing processing techniques and particularly in the fabrication of III-V compound and custom devices.

Original language	English (US)
Pages (from-to)	18-24
Number of pages	7
Journal	IEEE Circuits and Devices Magazine
Volume	2
Issue number	1
DOIs	https://doi.org/10.1109/MCD.1986.6311766
State	Published - Jan 1986
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Electrical and Electronic Engineering

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10.1109/MCD.1986.6311766

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title = "Photochemical Processing of Semiconductors: New Applications for Visible and Ultraviolet Lasers",

abstract = "A wide variety of semiconductor and metal films have recently been grown, doped, or etched by laser photochemical processes. While still early in its development, laser-driven processing of semiconductor devices appears promising as a supplement to existing processing techniques and particularly in the fabrication of III-V compound and custom devices.",

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Photochemical Processing of Semiconductors: New Applications for Visible and Ultraviolet Lasers

Abstract

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