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Photochemical growth of GaN and AlN on sapphire (0001) and GaAs(100)
P. C. John
, J. J. Alwan
,
J. G. Eden
Electrical and Computer Engineering
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peer-review
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Keyphrases
Gallium Arsenide
100%
Sapphire
100%
Growth Rate
100%
Xenon Lamp
100%
Diffraction
50%
Film Growth
50%
X-ray
50%
Basal Plane
50%
Laser Beams
50%
Argon
50%
UV Radiation
50%
Gallium Nitride
50%
Optical Source
50%
Wurtzite Structure
50%
Vapor Deposition
50%
GaN Growth
50%
Excimer Laser
50%
Gas Stream
50%
Aluminum Nitride Film
50%
ArF Laser
50%
Parallel Geometry
50%
Material Science
Film
100%
Gallium Arsenide
100%
Aluminum Nitride
100%
Sapphire
100%
Xenon
100%
Lamp
100%
X-Ray Diffraction
50%
Gallium Nitride
50%
Film Growth
50%
Feedstock
50%