Phonon and electron contributions to the thermal conductivity of v Nx epitaxial layers

Qiye Zheng, Antonio B. Mei, Mohit Tuteja, Davide G. Sangiovanni, Lars Hultman, Ivan Petrov, J. E. Greene, David G. Cahill

Research output: Contribution to journalArticle

Abstract

Thermal conductivities of VNx/MgO(001) (0.76≤x≤1.00) epitaxial layers, grown by reactive magnetron sputter deposition, are measured in the temperature range 300<T<1000K using time-domain thermoreflectance (TDTR). Data for the total thermal conductivity are compared to the electronic contribution to the thermal conductivity calculated from the measured electrical conductivity, the Wiedemann-Franz law, and an estimate of the temperature dependence of the Lorenz number L(T). The total thermal conductivity is dominated by electron contribution and varies between 13Wm-1K-1 at x=0.76 and 20Wm-1K-1 at x=1.00 for T=300K and between 25 and 35Wm-1K-1 for T=1000K. The lattice thermal conductivity vs x ranges from 5 to 7Wm-1K-1 at 300 K and decreases by 20% at 500 K. The low magnitude and weak temperature dependence of the lattice thermal conductivity are attributed to strong electron-phonon coupling in VN.

Original languageEnglish (US)
Article number065002
JournalPhysical Review Materials
Volume1
Issue number6
DOIs
StatePublished - Nov 20 2017

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Epitaxial layers
Thermal conductivity
thermal conductivity
Electrons
electrons
temperature dependence
Sputter deposition
Temperature
electrical resistivity
estimates
electronics

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Phonon and electron contributions to the thermal conductivity of v Nx epitaxial layers. / Zheng, Qiye; Mei, Antonio B.; Tuteja, Mohit; Sangiovanni, Davide G.; Hultman, Lars; Petrov, Ivan; Greene, J. E.; Cahill, David G.

In: Physical Review Materials, Vol. 1, No. 6, 065002, 20.11.2017.

Research output: Contribution to journalArticle

Zheng, Q, Mei, AB, Tuteja, M, Sangiovanni, DG, Hultman, L, Petrov, I, Greene, JE & Cahill, DG 2017, 'Phonon and electron contributions to the thermal conductivity of v Nx epitaxial layers', Physical Review Materials, vol. 1, no. 6, 065002. https://doi.org/10.1103/PhysRevMaterials.1.065002
Zheng, Qiye ; Mei, Antonio B. ; Tuteja, Mohit ; Sangiovanni, Davide G. ; Hultman, Lars ; Petrov, Ivan ; Greene, J. E. ; Cahill, David G. / Phonon and electron contributions to the thermal conductivity of v Nx epitaxial layers. In: Physical Review Materials. 2017 ; Vol. 1, No. 6.
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AU - Tuteja, Mohit

AU - Sangiovanni, Davide G.

AU - Hultman, Lars

AU - Petrov, Ivan

AU - Greene, J. E.

AU - Cahill, David G.

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