Phase change and cooling characteristics of microjets measured using microcantilever heaters

Jungchul Lee; Hanif Hunter; Ari Glezer; William P. King

doi:10.1016/j.sna.2008.03.022

Phase change and cooling characteristics of microjets measured using microcantilever heaters

Jungchul Lee, Hanif Hunter, Ari Glezer, William P. King

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reports novel microcantilever metrology tools to investigate free microjets emanating from a micromachined nozzle of diameter 10 μm. Microcantilevers with an integrated resistive heater-thermometer were used to study microjet cooling and phase change characteristics. While the microcantilever heater was aligned to and impinged upon by hydrocarbon microjets, the heater temperature was modulated by a constant voltage source. Successive heating and cooling cycles captured the microjet phase change hysteresis properties. When the microcantilever heater temperature was controlled, it was possible to construct a full boiling curve. Measurements were made on microjets of butane, hexane, and octane. The convective heat fluxes accompanied by microjet impingement boiling were 2.9-7.6 kW/cm² for heater temperatures of 25-350 °C. Overall, the techniques reported herein show promise for characterizing microscale jet flows.

Original language	English (US)
Pages (from-to)	64-69
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	147
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2008.03.022
State	Published - Sep 15 2008

Keywords

Anemometer
Boiling hysteresis
Critical heat flux
Microcantilever
Microjets

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Online availability

10.1016/j.sna.2008.03.022

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title = "Phase change and cooling characteristics of microjets measured using microcantilever heaters",

abstract = "This paper reports novel microcantilever metrology tools to investigate free microjets emanating from a micromachined nozzle of diameter 10 μm. Microcantilevers with an integrated resistive heater-thermometer were used to study microjet cooling and phase change characteristics. While the microcantilever heater was aligned to and impinged upon by hydrocarbon microjets, the heater temperature was modulated by a constant voltage source. Successive heating and cooling cycles captured the microjet phase change hysteresis properties. When the microcantilever heater temperature was controlled, it was possible to construct a full boiling curve. Measurements were made on microjets of butane, hexane, and octane. The convective heat fluxes accompanied by microjet impingement boiling were 2.9-7.6 kW/cm2 for heater temperatures of 25-350 °C. Overall, the techniques reported herein show promise for characterizing microscale jet flows.",

keywords = "Anemometer, Boiling hysteresis, Critical heat flux, Microcantilever, Microjets",

author = "Jungchul Lee and Hanif Hunter and Ari Glezer and King, {William P.}",

note = "Funding Information: William P. King received the B.S. degree in mechanical engineering from the University of Dayton (1996) and the M.S. (1998) and Ph.D. (2002) degrees in mechanical engineering from Stanford University. During 1999–2001, he spent 16 months in the Micro/NanoMechanics Group of the IBM Zurich Research Laboratory. During the years 2002–2006 he was on the faculty at Georgia Tech. At UIUC, his group works on thermal engineering of micro/nanomechanical devices, including thermomechanical data storage and nanoscale thermal processing. Dr. King is the winner of the CAREER award from the National Science Foundation (2003), the PECASE award from the Department of Energy (2005), and the Young Investigator Award from the Office of Naval Research (2007). In 2006, Technology Review Magazine named him to the TR35—one of the people under the age of 35 whose innovations are likely to change the world. In 2007 his innovations were selected for an R&D 100 Award and a Micro/Nano 25 Award. He sits on the scientific advisory board at seven companies and is a Fellow of the Defense Sciences Research Council. Funding Information: This work was supported by a National Science Foundation under Grant # 0304009. ",

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doi = "10.1016/j.sna.2008.03.022",

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AU - Hunter, Hanif

AU - Glezer, Ari

AU - King, William P.

N1 - Funding Information: William P. King received the B.S. degree in mechanical engineering from the University of Dayton (1996) and the M.S. (1998) and Ph.D. (2002) degrees in mechanical engineering from Stanford University. During 1999–2001, he spent 16 months in the Micro/NanoMechanics Group of the IBM Zurich Research Laboratory. During the years 2002–2006 he was on the faculty at Georgia Tech. At UIUC, his group works on thermal engineering of micro/nanomechanical devices, including thermomechanical data storage and nanoscale thermal processing. Dr. King is the winner of the CAREER award from the National Science Foundation (2003), the PECASE award from the Department of Energy (2005), and the Young Investigator Award from the Office of Naval Research (2007). In 2006, Technology Review Magazine named him to the TR35—one of the people under the age of 35 whose innovations are likely to change the world. In 2007 his innovations were selected for an R&D 100 Award and a Micro/Nano 25 Award. He sits on the scientific advisory board at seven companies and is a Fellow of the Defense Sciences Research Council. Funding Information: This work was supported by a National Science Foundation under Grant # 0304009.

PY - 2008/9/15

Y1 - 2008/9/15

N2 - This paper reports novel microcantilever metrology tools to investigate free microjets emanating from a micromachined nozzle of diameter 10 μm. Microcantilevers with an integrated resistive heater-thermometer were used to study microjet cooling and phase change characteristics. While the microcantilever heater was aligned to and impinged upon by hydrocarbon microjets, the heater temperature was modulated by a constant voltage source. Successive heating and cooling cycles captured the microjet phase change hysteresis properties. When the microcantilever heater temperature was controlled, it was possible to construct a full boiling curve. Measurements were made on microjets of butane, hexane, and octane. The convective heat fluxes accompanied by microjet impingement boiling were 2.9-7.6 kW/cm2 for heater temperatures of 25-350 °C. Overall, the techniques reported herein show promise for characterizing microscale jet flows.

AB - This paper reports novel microcantilever metrology tools to investigate free microjets emanating from a micromachined nozzle of diameter 10 μm. Microcantilevers with an integrated resistive heater-thermometer were used to study microjet cooling and phase change characteristics. While the microcantilever heater was aligned to and impinged upon by hydrocarbon microjets, the heater temperature was modulated by a constant voltage source. Successive heating and cooling cycles captured the microjet phase change hysteresis properties. When the microcantilever heater temperature was controlled, it was possible to construct a full boiling curve. Measurements were made on microjets of butane, hexane, and octane. The convective heat fluxes accompanied by microjet impingement boiling were 2.9-7.6 kW/cm2 for heater temperatures of 25-350 °C. Overall, the techniques reported herein show promise for characterizing microscale jet flows.

KW - Anemometer

KW - Boiling hysteresis

KW - Critical heat flux

KW - Microcantilever

KW - Microjets

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EP - 69

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 1

ER -

Phase change and cooling characteristics of microjets measured using microcantilever heaters

Abstract

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