Performance evaluation considering mask misalignment in multiple patterning decomposition

Haitong Tian, Martin D.F. Wong

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fingerprint

Dive into the research topics of 'Performance evaluation considering mask misalignment in multiple patterning decomposition'. Together they form a unique fingerprint.

Keyphrases

Computer Science

Engineering

Material Science

Medicine and Dentistry