Patterning of thin-film microstructures on non-planar substrate surfaces using decal transfer lithography

Keyphrases

• Substrate Surface 100%
• Lithography 100%
• Decal Transfer Method 100%
• Thin Film Microstructure 100%
• Non-native Substrate 100%
• Microfabrication 50%
• Thin Film Materials 50%
• Convex Surface 50%
• Polydimethylsiloxane 50%
• Sputter Deposition 50%
• Plasma Etching 50%
• Multiple Indicators multiple Causes (MIMIC) 50%
• Non-planarity 50%
• Material Microstructure 50%
• Shadowing Effect 50%
• Adhesively 50%
• Thick Resist 50%
• Selective Pattern 50%

Engineering

• Thin Films 100%
• Microstructure 100%
• Lithography 100%
• Substrate Surface 100%
• Microfabrication 50%
• Polydimethylsiloxane 50%
• Film Material 50%
• Convex Surface 50%
• Material Microstructure 50%
• Shadowing Effect 50%

Material Science

• Thin Films 100%
• Lithography 100%
• Microfabrication 50%
• Poly(Dimethylsiloxane) 50%
• Sputter Deposition 50%
• Plasma Etching 50%