Keyphrases
Multi-walled Carbon Nanotubes (MWCNTs)
100%
Carbon Nanotubes
100%
Low Fluence
100%
Laser Photoablation
100%
Excimer Laser
100%
Photoresist
57%
Photoablation
42%
Ablation
28%
Microelectronics
28%
Complementary Metal Oxide Semiconductor
28%
Semiconductor Process
28%
Precision Control
14%
Fabrication Methods
14%
Incident Energy
14%
Single-walled Carbon Nanotube Film
14%
Pattern-based Approach
14%
Physical Forces
14%
Sensor-actuators
14%
Threshold Energy
14%
Quartz Substrate
14%
Energy Conditions
14%
Laser Projection
14%
Pattern Geometry
14%
Device Sensors
14%
Highly Porous Materials
14%
Mass Fabrication
14%
Carbon Nanotube Interlayer
14%
Engineering
Single-Walled Carbon Nanotube
100%
Carbon Nanotube
100%
Excimer Laser
100%
Photoresist
50%
Complementary Metal-Oxide-Semiconductor
25%
Optoelectronic Device
12%
Incident Energy
12%
Microelectronics
12%
Material Component
12%
Patterning Method
12%
Threshold Energy
12%
Microelectronics Fabrication
12%
Direct Ablation
12%
Energy Condition
12%
Sensor Device
12%
Porosity
12%
Actuator
12%
Silicon Dioxide
12%
Material Science
Carbon Nanotube
100%
Complementary Metal-Oxide-Semiconductor Device
20%
Film
10%
Actuator
10%