Patterning of single walled carbon nanotubes using a low-fluence excimer laser photoablation process

Keyphrases

• Multi-walled Carbon Nanotubes (MWCNTs) 100%
• Carbon Nanotubes 100%
• Low Fluence 100%
• Laser Photoablation 100%
• Excimer Laser 100%
• Photoresist 57%
• Photoablation 42%
• Ablation 28%
• Microelectronics 28%
• Complementary Metal Oxide Semiconductor 28%
• Semiconductor Process 28%
• Precision Control 14%
• Fabrication Methods 14%
• Incident Energy 14%
• Single-walled Carbon Nanotube Film 14%
• Pattern-based Approach 14%
• Physical Forces 14%
• Sensor-actuators 14%
• Threshold Energy 14%
• Quartz Substrate 14%
• Energy Conditions 14%
• Laser Projection 14%
• Pattern Geometry 14%
• Device Sensors 14%
• Highly Porous Materials 14%
• Mass Fabrication 14%
• Carbon Nanotube Interlayer 14%

Engineering

• Single-Walled Carbon Nanotube 100%
• Carbon Nanotube 100%
• Excimer Laser 100%
• Photoresist 50%
• Complementary Metal-Oxide-Semiconductor 25%
• Optoelectronic Device 12%
• Incident Energy 12%
• Microelectronics 12%
• Material Component 12%
• Patterning Method 12%
• Threshold Energy 12%
• Microelectronics Fabrication 12%
• Direct Ablation 12%
• Energy Condition 12%
• Sensor Device 12%
• Porosity 12%
• Actuator 12%
• Silicon Dioxide 12%

Material Science

• Carbon Nanotube 100%
• Complementary Metal-Oxide-Semiconductor Device 20%
• Film 10%
• Actuator 10%