Patterned oxide semiconductor by electrohydrodynamic jet printing for transparent thin film transistors

Sangkyu Lee, Jeonghyun Kim, Junghyun Choi, Hyunjung Park, Jaehwan Ha, Yongkwan Kim, John A. Rogers, Ungyu Paik

Research output: Contribution to journalArticlepeer-review

Abstract

This paper explores transport in transparent thin film transistors formed using a liquid precursor to indium zinc oxide, delivered to target substrates by electrohydrodynamic jet (e-jet) printing. Under optimized conditions, we observe field effect mobilities as high as 32 cm 2V -1s -1, with on/off current ratios of 10 3 and threshold voltages of 2 V. These results provide evidence that material manipulated in fine-jet, electric field induced liquid flows can yield semiconductor devices without any adverse effects of residual charge or unintentional doping. E-jet printing methods provide levels of resolution (∼1.5 m) that provide a path to printed transistors with small critical dimensions.

Original languageEnglish (US)
Article number102108
JournalApplied Physics Letters
Volume100
Issue number10
DOIs
StatePublished - Mar 5 2012
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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