Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides

Xin Yu; Lynford L. Goddard; Jinlong Zhu; Xiuling Li; Xiaogang Chen

doi:10.1063/1.5017707

Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides

Xin Yu
, Lynford L. Goddard
, Jinlong Zhu
, Xiuling Li
, Xiaogang Chen

Research output: Contribution to journal › Article › peer-review

Abstract

The passive tuning of the resonant coupling wavelength in a SiN_x vertical microring coupler (VμRC) monolithically integrated on a ridge waveguide by engineering the structural parameters of the VμRCs is experimentally demonstrated and theoretically verified. Multi-channel photonic coupling is achieved by integrating two different VμRCs on a single ridge waveguide. This work represents a critical step to 3D photonic integration using VμRCs.

Original language	English (US)
Article number	021108
Journal	Applied Physics Letters
Volume	112
Issue number	2
DOIs	https://doi.org/10.1063/1.5017707
State	Published - Jan 8 2018

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.5017707

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title = "Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides",

abstract = "The passive tuning of the resonant coupling wavelength in a SiNx vertical microring coupler (VμRC) monolithically integrated on a ridge waveguide by engineering the structural parameters of the VμRCs is experimentally demonstrated and theoretically verified. Multi-channel photonic coupling is achieved by integrating two different VμRCs on a single ridge waveguide. This work represents a critical step to 3D photonic integration using VμRCs.",

author = "Xin Yu and Goddard, \{Lynford L.\} and Jinlong Zhu and Xiuling Li and Xiaogang Chen",

note = "This work was carried out in the Micro and Nanotechnology Laboratory at the University of Illinois. X.C. and X.Y. acknowledge financial support from the startup fund provided to X.C. by the University of Illinois. L.L.G. acknowledges financial support from NSF CAREER Award ECCS-1055941 with matching funds from the University of Illinois. J.Z. acknowledges financial support from gift Award CG-624009 from Cisco Systems, Inc. X.L. acknowledges financial support from the U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering under Award No. DE-FG0207ER46471.",

year = "2018",

month = jan,

day = "8",

doi = "10.1063/1.5017707",

language = "English (US)",

volume = "112",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

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AU - Yu, Xin

AU - Goddard, Lynford L.

AU - Zhu, Jinlong

AU - Li, Xiuling

AU - Chen, Xiaogang

N1 - This work was carried out in the Micro and Nanotechnology Laboratory at the University of Illinois. X.C. and X.Y. acknowledge financial support from the startup fund provided to X.C. by the University of Illinois. L.L.G. acknowledges financial support from NSF CAREER Award ECCS-1055941 with matching funds from the University of Illinois. J.Z. acknowledges financial support from gift Award CG-624009 from Cisco Systems, Inc. X.L. acknowledges financial support from the U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering under Award No. DE-FG0207ER46471.

PY - 2018/1/8

Y1 - 2018/1/8

N2 - The passive tuning of the resonant coupling wavelength in a SiNx vertical microring coupler (VμRC) monolithically integrated on a ridge waveguide by engineering the structural parameters of the VμRCs is experimentally demonstrated and theoretically verified. Multi-channel photonic coupling is achieved by integrating two different VμRCs on a single ridge waveguide. This work represents a critical step to 3D photonic integration using VμRCs.

AB - The passive tuning of the resonant coupling wavelength in a SiNx vertical microring coupler (VμRC) monolithically integrated on a ridge waveguide by engineering the structural parameters of the VμRCs is experimentally demonstrated and theoretically verified. Multi-channel photonic coupling is achieved by integrating two different VμRCs on a single ridge waveguide. This work represents a critical step to 3D photonic integration using VμRCs.

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Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides

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