The passive tuning of the resonant coupling wavelength in a SiNx vertical microring coupler (VμRC) monolithically integrated on a ridge waveguide by engineering the structural parameters of the VμRCs is experimentally demonstrated and theoretically verified. Multi-channel photonic coupling is achieved by integrating two different VμRCs on a single ridge waveguide. This work represents a critical step to 3D photonic integration using VμRCs.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)