Passivated electrode actuator with stable resonance amplitude

G. Bah, R. G. Walmsley, B. E. DeMartini, K. L. Turner, P. G. Hartwell

Research output: Contribution to journalConference articlepeer-review


In this paper we demonstrate how parametric resonant excitation of a surface drive actuator with dielectric coated electrodes makes the response amplitude independent of the driving force. This behavior can be beneficially utilized to maintain constant excitation amplitude in spite of time-varying charge screening on dielectric passivated electrodes and the associated actuation force decay. Such operation makes the device suitable for applications where constant amplitude operation is critical, such as driving vibratory rate gyroscopes.

Original languageEnglish (US)
Article number4805579
Pages (from-to)1099-1102
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
StatePublished - 2009
Externally publishedYes
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: Jan 25 2009Jan 29 2009

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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