Abstract
In this paper we demonstrate how parametric resonant excitation of a surface drive actuator with dielectric coated electrodes makes the response amplitude independent of the driving force. This behavior can be beneficially utilized to maintain constant excitation amplitude in spite of time-varying charge screening on dielectric passivated electrodes and the associated actuation force decay. Such operation makes the device suitable for applications where constant amplitude operation is critical, such as driving vibratory rate gyroscopes.
Original language | English (US) |
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Article number | 4805579 |
Pages (from-to) | 1099-1102 |
Number of pages | 4 |
Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
DOIs | |
State | Published - 2009 |
Externally published | Yes |
Event | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: Jan 25 2009 → Jan 29 2009 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering