Passivated electrode actuator with stable resonance amplitude

G. Bah; R. G. Walmsley; B. E. DeMartini; K. L. Turner; P. G. Hartwell

doi:10.1109/MEMSYS.2009.4805579

Passivated electrode actuator with stable resonance amplitude

G. Bah, R. G. Walmsley, B. E. DeMartini, K. L. Turner, P. G. Hartwell

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this paper we demonstrate how parametric resonant excitation of a surface drive actuator with dielectric coated electrodes makes the response amplitude independent of the driving force. This behavior can be beneficially utilized to maintain constant excitation amplitude in spite of time-varying charge screening on dielectric passivated electrodes and the associated actuation force decay. Such operation makes the device suitable for applications where constant amplitude operation is critical, such as driving vibratory rate gyroscopes.

Original language	English (US)
Article number	4805579
Pages (from-to)	1099-1102
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805579
State	Published - 2009
Externally published	Yes
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: Jan 25 2009 → Jan 29 2009

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2009.4805579

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title = "Passivated electrode actuator with stable resonance amplitude",

abstract = "In this paper we demonstrate how parametric resonant excitation of a surface drive actuator with dielectric coated electrodes makes the response amplitude independent of the driving force. This behavior can be beneficially utilized to maintain constant excitation amplitude in spite of time-varying charge screening on dielectric passivated electrodes and the associated actuation force decay. Such operation makes the device suitable for applications where constant amplitude operation is critical, such as driving vibratory rate gyroscopes.",

author = "G. Bah and Walmsley, {R. G.} and DeMartini, {B. E.} and Turner, {K. L.} and Hartwell, {P. G.}",

year = "2009",

doi = "10.1109/MEMSYS.2009.4805579",

language = "English (US)",

pages = "1099--1102",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 ; Conference date: 25-01-2009 Through 29-01-2009",

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T1 - Passivated electrode actuator with stable resonance amplitude

AU - Bah, G.

AU - Walmsley, R. G.

AU - DeMartini, B. E.

AU - Turner, K. L.

AU - Hartwell, P. G.

PY - 2009

Y1 - 2009

N2 - In this paper we demonstrate how parametric resonant excitation of a surface drive actuator with dielectric coated electrodes makes the response amplitude independent of the driving force. This behavior can be beneficially utilized to maintain constant excitation amplitude in spite of time-varying charge screening on dielectric passivated electrodes and the associated actuation force decay. Such operation makes the device suitable for applications where constant amplitude operation is critical, such as driving vibratory rate gyroscopes.

AB - In this paper we demonstrate how parametric resonant excitation of a surface drive actuator with dielectric coated electrodes makes the response amplitude independent of the driving force. This behavior can be beneficially utilized to maintain constant excitation amplitude in spite of time-varying charge screening on dielectric passivated electrodes and the associated actuation force decay. Such operation makes the device suitable for applications where constant amplitude operation is critical, such as driving vibratory rate gyroscopes.

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JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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M1 - 4805579

T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009

Y2 - 25 January 2009 through 29 January 2009

ER -

Passivated electrode actuator with stable resonance amplitude

Abstract

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