Abstract
Many existing computer-aided design systems for MEMS require the generation of a three-dimensional mesh for computational analysis of the microdevice. Mesh generation requirements for microdevices are very complicated because of the presence of mixed-energy domains and the different numerical techniques implemented for each energy domain. For example, volume meshes are employed for finite-element analysis of structural deformation and surface meshes are employed for boundary-element analysis of electrostatic forces on the structure. This paper describes a meshless technique, using which the analysis of a complicated microdevice can be performed by sprinkling points instead of generating a mesh.
| Original language | English (US) |
|---|---|
| Title of host publication | Micro-Electro-Mechanical Systems (MEMS) |
| Editors | R.J. Furness |
| Publisher | ASME |
| Pages | 531-535 |
| Number of pages | 5 |
| Volume | 66 |
| State | Published - 1998 |
| Event | Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition - Anaheim, CA, USA Duration: Nov 15 1998 → Nov 20 1998 |
Other
| Other | Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition |
|---|---|
| City | Anaheim, CA, USA |
| Period | 11/15/98 → 11/20/98 |
ASJC Scopus subject areas
- Software
- Mechanical Engineering