Abstract

Many existing computer-aided design systems for MEMS require the generation of a three-dimensional mesh for computational analysis of the microdevice. Mesh generation requirements for microdevices are very complicated because of the presence of mixed-energy domains and the different numerical techniques implemented for each energy domain. For example, volume meshes are employed for finite-element analysis of structural deformation and surface meshes are employed for boundary-element analysis of electrostatic forces on the structure. This paper describes a meshless technique, using which the analysis of a complicated microdevice can be performed by sprinkling points instead of generating a mesh.

Original languageEnglish (US)
Title of host publicationMicro-Electro-Mechanical Systems (MEMS)
EditorsR.J. Furness
PublisherASME
Pages531-535
Number of pages5
Volume66
StatePublished - 1998
EventProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition - Anaheim, CA, USA
Duration: Nov 15 1998Nov 20 1998

Other

OtherProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition
CityAnaheim, CA, USA
Period11/15/9811/20/98

ASJC Scopus subject areas

  • Software
  • Mechanical Engineering

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  • Cite this

    Aluru, N. R. (1998). Particle method for analysis of microelectromechanical switches. In R. J. Furness (Ed.), Micro-Electro-Mechanical Systems (MEMS) (Vol. 66, pp. 531-535). ASME.