Parametric excitation in geometrically optimized AlN contour mode resonators

Ruochen Lu, Anming Gao, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work reports the first observation of parametric excitation in geometrically optimized Aluminum Nitride (AlN) contour mode resonators (CMRs). The concept of parametric excited AlN CMRs harnesses the fact that the resonant frequencies of extensional mode vibrations along transverse and longitudinal directions can both be determined by resonator dimensions. Therefore, by geometrically optimizing lateral dimensions, dual resonances can be engineered at f0 and 2f0 respectively for inputting parametric excitation and outputting fundamental oscillations. In operation, the parametric excitation amplifies an orthogonal oscillation at f0 by periodically modulating the stiffness constants of AlN piezoelectric thin film via straining the structure. The experimental results have shown quality factor (Q) enhancement from 50 ot 2708 for a parametrically excited resonance. Upon further scaling and optimizations, it is anticipated that this type of devices will lead to the development of GHz low noise frequency sources and nano-electro-mechanical logic.

Original languageEnglish (US)
Title of host publication2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781479988662
DOIs
StatePublished - Jun 29 2015
Event2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Denver, United States
Duration: Apr 12 2015Apr 16 2015

Publication series

Name2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings

Other

Other2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015
Country/TerritoryUnited States
CityDenver
Period4/12/154/16/15

Keywords

  • aluminum nitride
  • contour mode resonators
  • parametric excitation
  • quality factor enhancement

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Signal Processing

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