TY - GEN
T1 - Parametric excitation in geometrically optimized AlN contour mode resonators
AU - Lu, Ruochen
AU - Gao, Anming
AU - Gong, Songbin
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/6/29
Y1 - 2015/6/29
N2 - This work reports the first observation of parametric excitation in geometrically optimized Aluminum Nitride (AlN) contour mode resonators (CMRs). The concept of parametric excited AlN CMRs harnesses the fact that the resonant frequencies of extensional mode vibrations along transverse and longitudinal directions can both be determined by resonator dimensions. Therefore, by geometrically optimizing lateral dimensions, dual resonances can be engineered at f0 and 2f0 respectively for inputting parametric excitation and outputting fundamental oscillations. In operation, the parametric excitation amplifies an orthogonal oscillation at f0 by periodically modulating the stiffness constants of AlN piezoelectric thin film via straining the structure. The experimental results have shown quality factor (Q) enhancement from 50 ot 2708 for a parametrically excited resonance. Upon further scaling and optimizations, it is anticipated that this type of devices will lead to the development of GHz low noise frequency sources and nano-electro-mechanical logic.
AB - This work reports the first observation of parametric excitation in geometrically optimized Aluminum Nitride (AlN) contour mode resonators (CMRs). The concept of parametric excited AlN CMRs harnesses the fact that the resonant frequencies of extensional mode vibrations along transverse and longitudinal directions can both be determined by resonator dimensions. Therefore, by geometrically optimizing lateral dimensions, dual resonances can be engineered at f0 and 2f0 respectively for inputting parametric excitation and outputting fundamental oscillations. In operation, the parametric excitation amplifies an orthogonal oscillation at f0 by periodically modulating the stiffness constants of AlN piezoelectric thin film via straining the structure. The experimental results have shown quality factor (Q) enhancement from 50 ot 2708 for a parametrically excited resonance. Upon further scaling and optimizations, it is anticipated that this type of devices will lead to the development of GHz low noise frequency sources and nano-electro-mechanical logic.
KW - aluminum nitride
KW - contour mode resonators
KW - parametric excitation
KW - quality factor enhancement
UR - http://www.scopus.com/inward/record.url?scp=84943238254&partnerID=8YFLogxK
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U2 - 10.1109/FCS.2015.7138781
DO - 10.1109/FCS.2015.7138781
M3 - Conference contribution
AN - SCOPUS:84943238254
T3 - 2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings
SP - 1
EP - 4
BT - 2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015
Y2 - 12 April 2015 through 16 April 2015
ER -