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Parallelization of thermochemical nanolithography
Keith M. Carroll, Xi Lu, Suenne Kim, Yang Gao, Hoe Joon Kim, Suhas Somnath, Laura Polloni, Roman Sordan, William P. King, Jennifer E. Curtis, Elisa Riedo
- Mechanical Science and Engineering
- Grainger College of Engineering
- Materials Science and Engineering
- Materials Research Lab
- Information Trust Institute
- Micro and Nanotechnology Lab
- Electrical and Computer Engineering
- Beckman Institute for Advanced Science and Technology
- Biomedical and Translational Sciences
Research output: Contribution to journal › Article › peer-review