Parallel-kinematics XYZ MEMS part 2: Fabrication and experimental characterization

Keyphrases

• Experimental Characterization 100%
• Device Layer 100%
• Parallel Kinematics 100%
• MEMS Stage 100%
• 3-axis 50%
• Sensing Element 50%
• Layer Two 50%
• Silicon-on-insulator 50%
• Workspace 50%
• Dynamic Model 50%
• Closed-loop 50%
• Spatial Translation 50%
• Feedback Controller 50%
• Insulator Substrate 50%
• Kinematic Model 50%
• Actuated Joints 50%
• In-plane Stiffness 50%
• Double Devices 50%
• Out-of-plane Stiffness 50%

Engineering

• Microelectromechanical System 100%
• Experimental Characterization 100%
• Plane Stiffness 66%
• Realization 33%
• Joints (Structural Components) 33%
• Sensing Element 33%
• Dynamic Models 33%
• Silicon on Insulator 33%
• Closed Loop 33%
• Feedback Controller 33%
• Kinematic Model 33%