Parallel-kinematics XYZ MEMS part 1: Kinematics and design for fabrication

Keyphrases

• Kinematics 100%
• Parallel Kinematics 100%
• Microfabrication 50%
• SOI Wafer 50%
• Nanotechnology 50%
• Actuation 50%
• Microsystems 50%
• Workspace 50%
• Microfabrication Techniques 50%
• End-effector 50%
• Functional Mechanism 50%
• Device Layer 50%
• Detailed Design 50%
• Parallel Kinematic Mechanism 50%
• Nanopositioning System 50%
• Kinematic Chain 50%
• Micro-positioning Platform 50%
• Displacement Sensing 50%
• Double Devices 50%
• Oreo 50%

Engineering

• Microelectromechanical System 100%
• Microfabrication 100%
• Actuation 50%
• Kinematic Chain 50%
• End Effector 50%