TY - JOUR
T1 - Parallel-kinematics XYZ MEMS part 1
T2 - Kinematics and design for fabrication
AU - Correa, Jorge
AU - Koo, Bonjin
AU - Ferreira, Placid
N1 - Publisher Copyright:
© 2016 Elsevier Inc.
PY - 2016/10/1
Y1 - 2016/10/1
N2 - Micro- and nanopositioning systems are widely used in the field of nanotechnology for probing, imaging, and increasingly for processing. This two-part set of papers presents a MEMS-scale parallel-kinematics mechanism, designed to achieve pure spatial (X, Y and Z) translation. With three independent kinematic chains connecting the end-effector to the base, a fully functional mechanism with axis actuation and displacement sensing is realized in a double device layer (“oreo”) SOI wafer using only conventional, microfabrication processes. This paper, the first in a two paper set, presents the mechanism, specially designed for scalable microfabrication. It analyzes its kinematics and dynamics, and characterizes its workspace. Part II of this set of papers describes the detailed design, fabrication, characterization and control of the devices.
AB - Micro- and nanopositioning systems are widely used in the field of nanotechnology for probing, imaging, and increasingly for processing. This two-part set of papers presents a MEMS-scale parallel-kinematics mechanism, designed to achieve pure spatial (X, Y and Z) translation. With three independent kinematic chains connecting the end-effector to the base, a fully functional mechanism with axis actuation and displacement sensing is realized in a double device layer (“oreo”) SOI wafer using only conventional, microfabrication processes. This paper, the first in a two paper set, presents the mechanism, specially designed for scalable microfabrication. It analyzes its kinematics and dynamics, and characterizes its workspace. Part II of this set of papers describes the detailed design, fabrication, characterization and control of the devices.
KW - Flexure stage
KW - Nanopositioning
KW - Parallel-kinematics mechanisms
KW - XYZ MEMS
UR - http://www.scopus.com/inward/record.url?scp=84992562513&partnerID=8YFLogxK
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U2 - 10.1016/j.precisioneng.2016.04.009
DO - 10.1016/j.precisioneng.2016.04.009
M3 - Article
AN - SCOPUS:84992562513
SN - 0141-6359
VL - 46
SP - 135
EP - 146
JO - Precision Engineering
JF - Precision Engineering
ER -