Parallel, individually addressable probes for nanolithography

Chang Liu (Inventor), Ming Zhang (Inventor), David A Bullen (Inventor)

Research output: Patent


A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.
Original languageEnglish (US)
U.S. patent number6867443
Filing date8/25/03
StatePublished - Mar 15 2005


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