Parallel, individually addressable probes for nanolithography

Chang Liu; Ming Zhang; David A Bullen

Parallel, individually addressable probes for nanolithography

Chang Liu (Inventor), Ming Zhang (Inventor), David A Bullen (Inventor)

Research output: Patent

Abstract

A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.

Original language	English (US)
U.S. patent number	6867443
Filing date	8/25/03
State	Published - Mar 15 2005

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title = "Parallel, individually addressable probes for nanolithography",

abstract = "A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.",

author = "Chang Liu and Ming Zhang and Bullen, {David A}",

note = "STATEMENT OF GOVERNMENT INTEREST This invention was made with United States Government assistance through Defense Advanced Research Projects Agency (DARPA) Contract No. NW 0650 300 F 245. The Government has certain rights in is invention.; 6867443",

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T1 - Parallel, individually addressable probes for nanolithography

AU - Liu, Chang

AU - Zhang, Ming

AU - Bullen, David A

N1 - STATEMENT OF GOVERNMENT INTEREST This invention was made with United States Government assistance through Defense Advanced Research Projects Agency (DARPA) Contract No. NW 0650 300 F 245. The Government has certain rights in is invention.

PY - 2005/3/15

Y1 - 2005/3/15

N2 - A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.

AB - A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.

M3 - Patent

M1 - 6867443

Y2 - 2003/08/25

ER -

Parallel, individually addressable probes for nanolithography

Abstract

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