Parallel FETI-DP algorithm for defect detection in large-area nanopatterned wafers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An efficient parallelization of the dual-primal finite-element tearing and interconnecting algorithm (FETI-DP) is presented for detecting defects in large-area nanopatterned wafers. To reduce global communication, iterative solvers with an iterative classical Gram-Schmidt scheme and a communication-avoiding approach are implemented to solve the interface and the coarse corner problems, respectively. A preconditioner is developed to improve the iterative convergence of the coarse problem. Electromagnetic analysis of a wafer is presented to show the scalability and capability of the method for accurate defect detection.

Original languageEnglish (US)
Title of host publication2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509012596
DOIs
StatePublished - May 4 2016
EventIEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Honolulu, United States
Duration: Mar 13 2016Mar 17 2016

Publication series

Name2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings

Other

OtherIEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016
CountryUnited States
CityHonolulu
Period3/13/163/17/16

Fingerprint

FETI-DP
Defect Detection
Wafer
communication
wafers
Iterative Solvers
tearing
Primal-dual
Communication
defects
Parallelization
Preconditioner
Scalability
Defects
Finite Element
electromagnetism
Defect detection

ASJC Scopus subject areas

  • Computational Mathematics
  • Signal Processing
  • Instrumentation
  • Computer Networks and Communications

Cite this

Zhang, K., Goddard, L. L., & Jin, J. (2016). Parallel FETI-DP algorithm for defect detection in large-area nanopatterned wafers. In 2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings [7465398] (2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ROPACES.2016.7465398

Parallel FETI-DP algorithm for defect detection in large-area nanopatterned wafers. / Zhang, Kedi; Goddard, Lynford L; Jin, Jianming.

2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2016. 7465398 (2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhang, K, Goddard, LL & Jin, J 2016, Parallel FETI-DP algorithm for defect detection in large-area nanopatterned wafers. in 2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings., 7465398, 2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings, Institute of Electrical and Electronics Engineers Inc., IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016, Honolulu, United States, 3/13/16. https://doi.org/10.1109/ROPACES.2016.7465398
Zhang K, Goddard LL, Jin J. Parallel FETI-DP algorithm for defect detection in large-area nanopatterned wafers. In 2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2016. 7465398. (2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings). https://doi.org/10.1109/ROPACES.2016.7465398
Zhang, Kedi ; Goddard, Lynford L ; Jin, Jianming. / Parallel FETI-DP algorithm for defect detection in large-area nanopatterned wafers. 2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2016. (2016 IEEE/ACES International Conference on Wireless Information Technology, ICWITS 2016 and System and Applied Computational Electromagnetics, ACES 2016 - Proceedings).
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