Abstract
Aspects of the subject disclosure may include, for example, an apparatus comprising: a dielectric substrate; a plurality of membranes positioned upon the dielectric substrate, wherein each of the plurality of membranes has a first side and a second side, wherein each of the plurality of membranes has a pore disposed therein, wherein each pore extends through each respective membrane from the first side of the respective membrane to the second side of the respective membrane, wherein each pore is associated with a corresponding hole that extends through the dielectric substrate, and wherein each of the plurality of membranes is not in direct contact with any other of the plurality of membranes; and a plurality of electrode pairs, wherein each of the plurality of electrode pairs is in contact with a single respective one of the plurality of membranes. Additional embodiments are disclosed.
Original language | English (US) |
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U.S. patent number | 11099170 |
State | Published - Aug 24 2021 |