Overmoded shear horizontal wave MEMS resonators using X-cut lithium niobate thin film

Songbin Gong, Gianluca Piazza

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This work reports on the design, analysis and development of a lithium niobate (LN) based overmoded shear horizontal 0 (SH0) resonator. The device is extensively modeled using finite element method and a variety of resonance modes are identified in the simulated device response. The designed devices were subsequently fabricated by leveraging the ion-slicing enabled film transfer as well as several advanced micromachining techniques. The fabricated resonator has demonstrated a large electromechanical coupling of 14.5%, a quality factor of 510, and a spurious mode free response. The measured response shows good agreement with simulated results. The demonstrated SH0 resonator offers significant advantages in frequency scalability, impedance matching to supporting electronics, and absence of spurious modes.

Original languageEnglish (US)
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Number of pages4
ISBN (Electronic)9781479970490
StatePublished - Oct 20 2014
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: Sep 3 2014Sep 6 2014

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727


Other2014 IEEE International Ultrasonics Symposium, IUS 2014
Country/TerritoryUnited States


  • MEMS
  • electromechanical coupling
  • lithium niobate
  • resonator
  • shear horizontal mode
  • spurious mode suppression

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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