TY - GEN
T1 - Overmoded shear horizontal wave MEMS resonators using X-cut lithium niobate thin film
AU - Gong, Songbin
AU - Piazza, Gianluca
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/10/20
Y1 - 2014/10/20
N2 - This work reports on the design, analysis and development of a lithium niobate (LN) based overmoded shear horizontal 0 (SH0) resonator. The device is extensively modeled using finite element method and a variety of resonance modes are identified in the simulated device response. The designed devices were subsequently fabricated by leveraging the ion-slicing enabled film transfer as well as several advanced micromachining techniques. The fabricated resonator has demonstrated a large electromechanical coupling of 14.5%, a quality factor of 510, and a spurious mode free response. The measured response shows good agreement with simulated results. The demonstrated SH0 resonator offers significant advantages in frequency scalability, impedance matching to supporting electronics, and absence of spurious modes.
AB - This work reports on the design, analysis and development of a lithium niobate (LN) based overmoded shear horizontal 0 (SH0) resonator. The device is extensively modeled using finite element method and a variety of resonance modes are identified in the simulated device response. The designed devices were subsequently fabricated by leveraging the ion-slicing enabled film transfer as well as several advanced micromachining techniques. The fabricated resonator has demonstrated a large electromechanical coupling of 14.5%, a quality factor of 510, and a spurious mode free response. The measured response shows good agreement with simulated results. The demonstrated SH0 resonator offers significant advantages in frequency scalability, impedance matching to supporting electronics, and absence of spurious modes.
KW - MEMS
KW - electromechanical coupling
KW - lithium niobate
KW - resonator
KW - shear horizontal mode
KW - spurious mode suppression
UR - http://www.scopus.com/inward/record.url?scp=84910027712&partnerID=8YFLogxK
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U2 - 10.1109/ULTSYM.2014.0140
DO - 10.1109/ULTSYM.2014.0140
M3 - Conference contribution
AN - SCOPUS:84910027712
T3 - IEEE International Ultrasonics Symposium, IUS
SP - 568
EP - 571
BT - IEEE International Ultrasonics Symposium, IUS
PB - IEEE Computer Society
T2 - 2014 IEEE International Ultrasonics Symposium, IUS 2014
Y2 - 3 September 2014 through 6 September 2014
ER -