Origin of debris in EUV sources and its mitigation

Research output: Chapter in Book/Report/Conference proceeding › Chapter

ASJC Scopus subject areas

@inbook{ab70725723b646b5a1fdc119ca6aacb1,

title = "Origin of debris in EUV sources and its mitigation",

author = "Ruzic, {David N}",

year = "2006",

month = feb,

day = "23",

doi = "10.1117/3.613774.Ch36",

language = "English (US)",

isbn = "0819458457",

pages = "957--993",

booktitle = "EUV Sources for Lithography",

publisher = "SPIE",

}

TY - CHAP

T1 - Origin of debris in EUV sources and its mitigation

AU - Ruzic, David N

PY - 2006/2/23

Y1 - 2006/2/23

UR - http://www.scopus.com/inward/record.url?scp=84960253966&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84960253966&partnerID=8YFLogxK

U2 - 10.1117/3.613774.Ch36

DO - 10.1117/3.613774.Ch36

M3 - Chapter

AN - SCOPUS:84960253966

SN - 0819458457

SN - 9780819458452

SP - 957

EP - 993

BT - EUV Sources for Lithography

PB - SPIE

ER -