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Organometallic Route to the Chemical Vapor Deposition of Titanium Carbide Films at Exceptionally Low Temperatures

  • Gregory S. Girolami
  • , James A. Jensen
  • , Deborah M. Pollina
  • , Wendell S. Williams
  • , Alain E. Kaloyeros
  • , Clare M. Allocca

Research output: Contribution to journal › Article › peer-review

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