Organometallic Route to the Chemical Vapor Deposition of Titanium Carbide Films at Exceptionally Low Temperatures

  • Gregory S. Girolami
  • , James A. Jensen
  • , Deborah M. Pollina
  • , Wendell S. Williams
  • , Alain E. Kaloyeros
  • , Clare M. Allocca

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)1579-1580
Number of pages2
JournalJournal of the American Chemical Society
Volume109
Issue number5
DOIs
StatePublished - Mar 1 1987

ASJC Scopus subject areas

  • Catalysis
  • General Chemistry
  • Biochemistry
  • Colloid and Surface Chemistry

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