Organometallic Route to the Chemical Vapor Deposition of Titanium Carbide Films at Exceptionally Low Temperatures

Gregory S. Girolami, James A. Jensen, Deborah M. Pollina, Wendell S. Williams, Alain E. Kaloyeros, Clare M. Allocca

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)1579-1580
Number of pages2
JournalJournal of the American Chemical Society
Volume109
Issue number5
DOIs
StatePublished - Mar 1 1987

ASJC Scopus subject areas

  • Catalysis
  • Chemistry(all)
  • Biochemistry
  • Colloid and Surface Chemistry

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