Orbital Angular Momentum Modes from VCSELs Using Grayscale Photolithography

Raman Kumar; Pawel Strzebonski; Katherine Lakomy; Kent D. Choquette

doi:10.1109/LPT.2021.3075891

Orbital Angular Momentum Modes from VCSELs Using Grayscale Photolithography

Raman Kumar, Pawel Strzebonski, Katherine Lakomy, Kent D. Choquette

Research output: Contribution to journal › Article › peer-review

Abstract

We present fabrication of dielectric micro-optical elements on VCSELs and characterization of emitted orbital angular momentum modes. Spiral phase plates are fabricated on the top facet of oxide-confined VCSELs using grayscale photolithography and dry etching silicon nitride. The refractive index of silicon nitride film is characterized using ellipsometry and atomic force microscopy is used to verify the fidelity of fabricated dielectric micro-optical elements. Orbital angular momentum modes with on-axis null are experimentally demonstrated. A novel circular rotation of intensity with propagation in the near-field is observed and is analyzed using Fresnel transfer function simulations.

Original language	English (US)
Article number	9416409
Pages (from-to)	824-827
Number of pages	4
Journal	IEEE Photonics Technology Letters
Volume	33
Issue number	16
DOIs	https://doi.org/10.1109/LPT.2021.3075891
State	Published - Aug 15 2021

Keywords

Orbital angular momentum modes
VCSELs
grayscale photolithography
integrated spiral phase plates

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

Online availability

10.1109/LPT.2021.3075891

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title = "Orbital Angular Momentum Modes from VCSELs Using Grayscale Photolithography",

abstract = "We present fabrication of dielectric micro-optical elements on VCSELs and characterization of emitted orbital angular momentum modes. Spiral phase plates are fabricated on the top facet of oxide-confined VCSELs using grayscale photolithography and dry etching silicon nitride. The refractive index of silicon nitride film is characterized using ellipsometry and atomic force microscopy is used to verify the fidelity of fabricated dielectric micro-optical elements. Orbital angular momentum modes with on-axis null are experimentally demonstrated. A novel circular rotation of intensity with propagation in the near-field is observed and is analyzed using Fresnel transfer function simulations. ",

keywords = "Orbital angular momentum modes, VCSELs, grayscale photolithography, integrated spiral phase plates",

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year = "2021",

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AU - Kumar, Raman

AU - Strzebonski, Pawel

AU - Lakomy, Katherine

AU - Choquette, Kent D.

PY - 2021/8/15

Y1 - 2021/8/15

N2 - We present fabrication of dielectric micro-optical elements on VCSELs and characterization of emitted orbital angular momentum modes. Spiral phase plates are fabricated on the top facet of oxide-confined VCSELs using grayscale photolithography and dry etching silicon nitride. The refractive index of silicon nitride film is characterized using ellipsometry and atomic force microscopy is used to verify the fidelity of fabricated dielectric micro-optical elements. Orbital angular momentum modes with on-axis null are experimentally demonstrated. A novel circular rotation of intensity with propagation in the near-field is observed and is analyzed using Fresnel transfer function simulations.

AB - We present fabrication of dielectric micro-optical elements on VCSELs and characterization of emitted orbital angular momentum modes. Spiral phase plates are fabricated on the top facet of oxide-confined VCSELs using grayscale photolithography and dry etching silicon nitride. The refractive index of silicon nitride film is characterized using ellipsometry and atomic force microscopy is used to verify the fidelity of fabricated dielectric micro-optical elements. Orbital angular momentum modes with on-axis null are experimentally demonstrated. A novel circular rotation of intensity with propagation in the near-field is observed and is analyzed using Fresnel transfer function simulations.

KW - Orbital angular momentum modes

KW - VCSELs

KW - grayscale photolithography

KW - integrated spiral phase plates

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Orbital Angular Momentum Modes from VCSELs Using Grayscale Photolithography

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