Optoelectronic device having an antireflective surface

Xiuling Li; Jeong Dong Kim; Munho Kim

Optoelectronic device having an antireflective surface

Xiuling Li (Inventor)
, Jeong Dong Kim (Inventor)
, Munho Kim (Inventor)

Electrical and Computer Engineering

Research output: Patent

Abstract

An optoelectronic device with an antireflective surface comprises a semiconductor substrate having a textured surface including a plurality of surface protrusions and/or indentations. A first electrode is in contact with the semiconductor substrate and spaced apart from a second electrode that is also in contact with the semiconductor substrate. The textured surface is fabricated by inverse metal-assisted chemical etching, and thus the semiconductor substrate is substantially devoid of ion-induced defects.

Original language	English (US)
U.S. patent number	10741705
Filing date	7/13/18
State	Published - Aug 11 2020

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title = "Optoelectronic device having an antireflective surface",

abstract = "An optoelectronic device with an antireflective surface comprises a semiconductor substrate having a textured surface including a plurality of surface protrusions and/or indentations. A first electrode is in contact with the semiconductor substrate and spaced apart from a second electrode that is also in contact with the semiconductor substrate. The textured surface is fabricated by inverse metal-assisted chemical etching, and thus the semiconductor substrate is substantially devoid of ion-induced defects.",

author = "Xiuling Li and Kim, \{Jeong Dong\} and Munho Kim",

note = "FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with government support under contract number 14-62946 awarded by the National Science Foundation. The government has certain rights in the invention.; 10741705",

year = "2020",

month = aug,

day = "11",

language = "English (US)",

type = "Patent",

}

TY - PAT

T1 - Optoelectronic device having an antireflective surface

AU - Li, Xiuling

AU - Kim, Jeong Dong

AU - Kim, Munho

N1 - FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with government support under contract number 14-62946 awarded by the National Science Foundation. The government has certain rights in the invention.

PY - 2020/8/11

Y1 - 2020/8/11

N2 - An optoelectronic device with an antireflective surface comprises a semiconductor substrate having a textured surface including a plurality of surface protrusions and/or indentations. A first electrode is in contact with the semiconductor substrate and spaced apart from a second electrode that is also in contact with the semiconductor substrate. The textured surface is fabricated by inverse metal-assisted chemical etching, and thus the semiconductor substrate is substantially devoid of ion-induced defects.

AB - An optoelectronic device with an antireflective surface comprises a semiconductor substrate having a textured surface including a plurality of surface protrusions and/or indentations. A first electrode is in contact with the semiconductor substrate and spaced apart from a second electrode that is also in contact with the semiconductor substrate. The textured surface is fabricated by inverse metal-assisted chemical etching, and thus the semiconductor substrate is substantially devoid of ion-induced defects.

M3 - Patent

M1 - 10741705

Y2 - 2018/07/13

ER -

Optoelectronic device having an antireflective surface

Abstract

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