TY - GEN
T1 - Opto-mechano-fluidic MEMS for extremely high-throughput photonic sensing of flowing microparticles
AU - Han, K.
AU - Kim, J.
AU - Bahl, G.
N1 - Publisher Copyright:
© 2016 TRF
PY - 2016
Y1 - 2016
N2 - MEMS microfluidic resonators allow the high-speed label-free mechanical (density, size, deformability) measurement of nanoparticles using kHz-MHz mechanical modes. Further increasing the sampling rate is hard since it requires increasing of mechanical resonance frequency and improving detection sensitivity which is not easy to achieve with electrostatic or piezoelectric transduction methods. To address these challenges, here we present a new label-free technique for sensing rapid free-flowing particles using opto-mechano-fluidic resonator (OMFR). Unlike other optomechanical sensors till date, the OMFR confines the analytes within a simple microchannel, eliminating the dependence on particle diffusion and random binding, and therefore improves the throughput to a potential 10,000 particles/s rate with nearly 100% detection efficiency.
AB - MEMS microfluidic resonators allow the high-speed label-free mechanical (density, size, deformability) measurement of nanoparticles using kHz-MHz mechanical modes. Further increasing the sampling rate is hard since it requires increasing of mechanical resonance frequency and improving detection sensitivity which is not easy to achieve with electrostatic or piezoelectric transduction methods. To address these challenges, here we present a new label-free technique for sensing rapid free-flowing particles using opto-mechano-fluidic resonator (OMFR). Unlike other optomechanical sensors till date, the OMFR confines the analytes within a simple microchannel, eliminating the dependence on particle diffusion and random binding, and therefore improves the throughput to a potential 10,000 particles/s rate with nearly 100% detection efficiency.
UR - http://www.scopus.com/inward/record.url?scp=85071433927&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85071433927&partnerID=8YFLogxK
U2 - 10.31438/trf.hh2016.70
DO - 10.31438/trf.hh2016.70
M3 - Conference contribution
AN - SCOPUS:85071433927
T3 - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
SP - 262
EP - 265
BT - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
A2 - Allen, Mark G.
A2 - Lamers, Tina
PB - Transducer Research Foundation
T2 - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
Y2 - 5 June 2016 through 9 June 2016
ER -