Opto-mechano-fluidic MEMS for extremely high-throughput photonic sensing of flowing microparticles

K. Han, J. Kim, G. Bahl

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

MEMS microfluidic resonators allow the high-speed label-free mechanical (density, size, deformability) measurement of nanoparticles using kHz-MHz mechanical modes. Further increasing the sampling rate is hard since it requires increasing of mechanical resonance frequency and improving detection sensitivity which is not easy to achieve with electrostatic or piezoelectric transduction methods. To address these challenges, here we present a new label-free technique for sensing rapid free-flowing particles using opto-mechano-fluidic resonator (OMFR). Unlike other optomechanical sensors till date, the OMFR confines the analytes within a simple microchannel, eliminating the dependence on particle diffusion and random binding, and therefore improves the throughput to a potential 10,000 particles/s rate with nearly 100% detection efficiency.

Original languageEnglish (US)
Title of host publication2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
EditorsMark G. Allen, Tina Lamers
PublisherTransducer Research Foundation
Pages262-265
Number of pages4
ISBN (Electronic)9781940470023
DOIs
StatePublished - 2016
Event2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States
Duration: Jun 5 2016Jun 9 2016

Publication series

Name2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Conference

Conference2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
Country/TerritoryUnited States
CityHilton Head
Period6/5/166/9/16

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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