Keyphrases
High-resolution
100%
Atomic Force Microscope
100%
Model Matching
100%
Positioning System
100%
High Bandwidth
100%
Matching Design
100%
Modeling Uncertainty
66%
Resolution Bandwidth
66%
Flexure Stage
66%
Decision Variables
33%
Nonlinear Effects
33%
Bandwidth Enhancement
33%
Actuator
33%
Control Design
33%
Performance Objectives
33%
Two-degree-of-freedom Control
33%
Feedback Controller
33%
Positioning Stage
33%
Fundamental Limitations
33%
Non-minimum Phase Zeros
33%
2DOF
33%
Feedforward Design
33%
Feedforward Controller
33%
Feedback Design
33%
Base Construction
33%
Two-degree-of-freedom Controller
33%
Stage-based
33%
Bode Integral
33%
Control Saturation
33%
Closed-loop Devices
33%
Piezo Actuation
33%
Integration Law
33%
Large Travel
33%
Engineering
High Resolution
100%
Atomic Force Microscope
100%
Limitations
100%
Matching Model
100%
Feedforward
66%
Two Degree of Freedom
66%
Flexure
66%
Resolution Bandwidth
66%
Constrains
33%
Nonlinear Effect
33%
Control Design
33%
Closed Loop
33%
Positioning Stage
33%
Decision Variable
33%
Design Basis
33%
Actuator
33%