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Optical properties of variable-composition aluminum/alumina thin films, part 1
Jy Yun Jung,
M. Quinn Brewster
Mechanical Science and Engineering
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Keyphrases
Optical Properties
100%
Variable Composition
100%
Oxygen Flow Ratio
100%
Alumina Thin Films
100%
Alumina Film
100%
Band Gap
66%
Ellipsometry
66%
Effective Medium Approximation
66%
Aluminum Oxide
33%
Glass Substrate
33%
Varying Composition
33%
Silica
33%
Optical Constants
33%
Resonance Energy
33%
Oxide Film
33%
Optical Measurement
33%
Aluminum Thin Films
33%
Reactive Sputtering
33%
Enhanced Absorption
33%
Lorentz Model
33%
Nearly Stoichiometric
33%
Additional Measurement
33%
Approximation Approach
33%
Dispersion Model
33%
Homogeneous Composition
33%
Sellmeier Model
33%
Quartz Glass
33%
Material Science
Optical Property
100%
Aluminum Oxide
100%
Thin Films
100%
Aluminum
100%
Film
60%
Optical Measurement
20%
Oxide Film
20%