@inproceedings{928cb223883a4c1bbf3f8805b1b5dcaa,
title = "Optical properties of metal coated nanoscrew Si",
abstract = "In this paper, a unique nanoscrew Si structure is presented. The nanoscrew surface is made by anodized aluminum oxide (AAO) mask formation followed by extended deep reactive ionic etching (DRIE). Dense random zig-zag pillar structures that represent screw shapes are formed, with 1 um in height and the bottom base width ranging from 100 nm to 250 nm. The tip of the nanoscrews have radius of curvature even lower than 10 nm. The apparent naked-eye view of the nanoscrew surface, which only consists of nanopatterned N-type single crystalline Si is diffusively green. The optical properties of nanoscrew Si with and without metal deposition is presented as discussion in applications for SERS.",
keywords = "Anodized Aluminum Oxide, Nanoscrew, Subwavelength nanostructures, Surface enhanced Raman scattering",
author = "Hyunjong Jin and Liu, {Logan Gang}",
year = "2011",
month = oct,
day = "19",
doi = "10.1117/12.893657",
language = "English (US)",
isbn = "9780819487063",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Plasmonics",
note = "Plasmonics: Metallic Nanostructures and Their Optical Properties IX ; Conference date: 21-08-2011 Through 25-08-2011",
}