Optical properties of metal coated nanoscrew Si

Hyunjong Jin, Logan Gang Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this paper, a unique nanoscrew Si structure is presented. The nanoscrew surface is made by anodized aluminum oxide (AAO) mask formation followed by extended deep reactive ionic etching (DRIE). Dense random zig-zag pillar structures that represent screw shapes are formed, with 1 um in height and the bottom base width ranging from 100 nm to 250 nm. The tip of the nanoscrews have radius of curvature even lower than 10 nm. The apparent naked-eye view of the nanoscrew surface, which only consists of nanopatterned N-type single crystalline Si is diffusively green. The optical properties of nanoscrew Si with and without metal deposition is presented as discussion in applications for SERS.

Original languageEnglish (US)
Title of host publicationPlasmonics
Subtitle of host publicationMetallic Nanostructures and Their Optical Properties IX
StatePublished - 2011
Externally publishedYes
EventPlasmonics: Metallic Nanostructures and Their Optical Properties IX - San Diego, CA, United States
Duration: Aug 21 2011Aug 25 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherPlasmonics: Metallic Nanostructures and Their Optical Properties IX
Country/TerritoryUnited States
CitySan Diego, CA


  • Anodized Aluminum Oxide
  • Nanoscrew
  • Subwavelength nanostructures
  • Surface enhanced Raman scattering

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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