Optical inspection of nanoscale structures using a novel machine learning based synthetic image generation algorithm

Keyphrases

• Optical Image 100%
• Nanoscale Structure 100%
• Machine Learning Based 100%
• Novel Machine 100%
• Optical Inspection 100%
• Image Generation Algorithm 100%
• Synthetic Image Generation 100%
• Training Set 66%
• Bridge Defects 66%
• Machine Learning Techniques 66%
• Nanoscale Defects 66%
• Electromagnetic Simulation 33%
• Wafer 33%
• Image Quality 33%
• Diffraction 33%
• Noise Reduction 33%
• Physical Insights 33%
• Semiconductor Wafer 33%
• Challenging Tasks 33%
• Parallel Bridge 33%
• Machine Learning Algorithms 33%
• Limited Training Data 33%
• Electromagnetic Optimization 33%
• Killer Defects 33%
• Visible Light Microscopy 33%
• Interpretable Machine Learning 33%