On the incorporation of arsenic (As) in GaN films by conventional MOCVD

X. Li, S. Kim, S. G. Bishop, J. J. Coleman

Research output: Contribution to journalConference articlepeer-review

Abstract

Arsenic was incorporated in GaN films by atmospheric pressure metalorganic chemical vapor deposition (MOCVD) using AsH3 and NH3 as the As and N sources. The optimum growth condition for the doping of As in order to produce strong luminescence at a characteristic emission wavelength (approximately 480 nm) was determined. The characteristic emission is attributed to excitons bound at As isoelectronic impurities.

Original languageEnglish (US)
Pages (from-to)8
Number of pages1
JournalLEOS Summer Topical Meeting
StatePublished - 1997
EventProceedings of the 1997 LEOS Summer Topical Meeting - Montreal, Can
Duration: Aug 11 1997Aug 15 1997

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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