On process-aware 1-D standard cell design

Hongbo Zhang, Martin D F Wong, Kai Yuan Chao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

When VLSI technology scales down to sub-40nm process node, systematic variation introduced by the lithography is a persistent challenge to the manufacturability. The limitation of the resolution enhancement technologies (RETs) forces people to adopt a regular cell design methodology. In this paper, targeted on 1-D cell design, we use simulation data to analyze the relationship between the line-end gap distribution and printability. Based on the gap distribution preferences, an optimal algorithm is provided to efficiently extend the line ends and insert dummies, which will significantly improve the gap distribution and help printability. Experimental results on 45nm and 32nm processes show that significant improvement can be obtained on edge placement error (EPE).

Original languageEnglish (US)
Title of host publication2010 15th Asia and South Pacific Design Automation Conference, ASP-DAC 2010
Pages838-842
Number of pages5
DOIs
StatePublished - Apr 28 2010
Event2010 15th Asia and South Pacific Design Automation Conference, ASP-DAC 2010 - Taipei, Taiwan, Province of China
Duration: Jan 18 2010Jan 21 2010

Publication series

NameProceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC

Other

Other2010 15th Asia and South Pacific Design Automation Conference, ASP-DAC 2010
CountryTaiwan, Province of China
CityTaipei
Period1/18/101/21/10

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ASJC Scopus subject areas

  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design
  • Electrical and Electronic Engineering

Cite this

Zhang, H., Wong, M. D. F., & Chao, K. Y. (2010). On process-aware 1-D standard cell design. In 2010 15th Asia and South Pacific Design Automation Conference, ASP-DAC 2010 (pp. 838-842). [5419686] (Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC). https://doi.org/10.1109/ASPDAC.2010.5419686