On-chip inductors with self-rolled-up SiNx nanomembrane tubes: A novel design platform for extreme miniaturization

Wen Huang, Xin Yu, Paul Froeter, Ruimin Xu, Placid Mathew Ferreira, Xiuling Li

Research output: Contribution to journalArticle

Abstract

Inductors are essential components of radio frequency integrated circuits (RFICs). While the active devices in RF systems downscale steadily, inductors have not been able to keep up with the pace of continual miniaturization because of the trade-off between size and performance as well as fabrication complexity. Strain-induced self-rolled-up nanotechnology allows the formation of three-dimensional (3D) architectures, such as multiple-turn spiral tubes, through planar processing. Here, we report on using 3D SiNx tubular structures with accompanying prepatterned metal layers, as a novel on-chip tube inductor design platform. We found, by an equivalent lumped circuit and electromagnetic modeling, that the 3D metal spiral structure has the ability to significantly better confine magnetic field compared to conventional planar spiral on-chip inductors. More than 100× reduction in footprint can be realized using this platform while achieving excellent electrical performance, including large inductance, high quality (Q) factor, and high self-resonance frequency (f0).

Original languageEnglish (US)
Pages (from-to)6283-6288
Number of pages6
JournalNano letters
Volume12
Issue number12
DOIs
StatePublished - Dec 12 2012

Fingerprint

miniaturization
inductors
platforms
Metals
chips
tubes
Nanotechnology
Inductance
Integrated circuits
Magnetic fields
Fabrication
Networks (circuits)
footprints
nanotechnology
Processing
inductance
metals
integrated circuits
Q factors
radio frequencies

Keywords

  • nanomembrane
  • on-chip inductor
  • self-rolled-up
  • SiN tube

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanical Engineering

Cite this

On-chip inductors with self-rolled-up SiNx nanomembrane tubes : A novel design platform for extreme miniaturization. / Huang, Wen; Yu, Xin; Froeter, Paul; Xu, Ruimin; Ferreira, Placid Mathew; Li, Xiuling.

In: Nano letters, Vol. 12, No. 12, 12.12.2012, p. 6283-6288.

Research output: Contribution to journalArticle

@article{9352b9347820444e8c37d7654e9178a8,
title = "On-chip inductors with self-rolled-up SiNx nanomembrane tubes: A novel design platform for extreme miniaturization",
abstract = "Inductors are essential components of radio frequency integrated circuits (RFICs). While the active devices in RF systems downscale steadily, inductors have not been able to keep up with the pace of continual miniaturization because of the trade-off between size and performance as well as fabrication complexity. Strain-induced self-rolled-up nanotechnology allows the formation of three-dimensional (3D) architectures, such as multiple-turn spiral tubes, through planar processing. Here, we report on using 3D SiNx tubular structures with accompanying prepatterned metal layers, as a novel on-chip tube inductor design platform. We found, by an equivalent lumped circuit and electromagnetic modeling, that the 3D metal spiral structure has the ability to significantly better confine magnetic field compared to conventional planar spiral on-chip inductors. More than 100× reduction in footprint can be realized using this platform while achieving excellent electrical performance, including large inductance, high quality (Q) factor, and high self-resonance frequency (f0).",
keywords = "nanomembrane, on-chip inductor, self-rolled-up, SiN tube",
author = "Wen Huang and Xin Yu and Paul Froeter and Ruimin Xu and Ferreira, {Placid Mathew} and Xiuling Li",
year = "2012",
month = "12",
day = "12",
doi = "10.1021/nl303395d",
language = "English (US)",
volume = "12",
pages = "6283--6288",
journal = "Nano Letters",
issn = "1530-6984",
publisher = "American Chemical Society",
number = "12",

}

TY - JOUR

T1 - On-chip inductors with self-rolled-up SiNx nanomembrane tubes

T2 - A novel design platform for extreme miniaturization

AU - Huang, Wen

AU - Yu, Xin

AU - Froeter, Paul

AU - Xu, Ruimin

AU - Ferreira, Placid Mathew

AU - Li, Xiuling

PY - 2012/12/12

Y1 - 2012/12/12

N2 - Inductors are essential components of radio frequency integrated circuits (RFICs). While the active devices in RF systems downscale steadily, inductors have not been able to keep up with the pace of continual miniaturization because of the trade-off between size and performance as well as fabrication complexity. Strain-induced self-rolled-up nanotechnology allows the formation of three-dimensional (3D) architectures, such as multiple-turn spiral tubes, through planar processing. Here, we report on using 3D SiNx tubular structures with accompanying prepatterned metal layers, as a novel on-chip tube inductor design platform. We found, by an equivalent lumped circuit and electromagnetic modeling, that the 3D metal spiral structure has the ability to significantly better confine magnetic field compared to conventional planar spiral on-chip inductors. More than 100× reduction in footprint can be realized using this platform while achieving excellent electrical performance, including large inductance, high quality (Q) factor, and high self-resonance frequency (f0).

AB - Inductors are essential components of radio frequency integrated circuits (RFICs). While the active devices in RF systems downscale steadily, inductors have not been able to keep up with the pace of continual miniaturization because of the trade-off between size and performance as well as fabrication complexity. Strain-induced self-rolled-up nanotechnology allows the formation of three-dimensional (3D) architectures, such as multiple-turn spiral tubes, through planar processing. Here, we report on using 3D SiNx tubular structures with accompanying prepatterned metal layers, as a novel on-chip tube inductor design platform. We found, by an equivalent lumped circuit and electromagnetic modeling, that the 3D metal spiral structure has the ability to significantly better confine magnetic field compared to conventional planar spiral on-chip inductors. More than 100× reduction in footprint can be realized using this platform while achieving excellent electrical performance, including large inductance, high quality (Q) factor, and high self-resonance frequency (f0).

KW - nanomembrane

KW - on-chip inductor

KW - self-rolled-up

KW - SiN tube

UR - http://www.scopus.com/inward/record.url?scp=84870892498&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84870892498&partnerID=8YFLogxK

U2 - 10.1021/nl303395d

DO - 10.1021/nl303395d

M3 - Article

C2 - 23171136

AN - SCOPUS:84870892498

VL - 12

SP - 6283

EP - 6288

JO - Nano Letters

JF - Nano Letters

SN - 1530-6984

IS - 12

ER -