A tunable micromechanical bistable system consisting of a long slender micromechanical beam attached to an actuator is introduced. This system is characterized using an analytical model based on the first mode of buckling of the beam. Several examples of possible applications of the system are given, including digital sensing of physical parameters.

Original languageEnglish (US)
Pages (from-to)157-170
Number of pages14
JournalJournal of Microelectromechanical Systems
Issue number2
StatePublished - Jun 2000

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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