On a tunable bistable MEMS - theory and experiment

M. Taher A. Saif

doi:10.1109/84.846696

On a tunable bistable MEMS - theory and experiment

Research output: Contribution to journal › Article › peer-review

Abstract

A tunable micromechanical bistable system consisting of a long slender micromechanical beam attached to an actuator is introduced. This system is characterized using an analytical model based on the first mode of buckling of the beam. Several examples of possible applications of the system are given, including digital sensing of physical parameters.

Original language	English (US)
Pages (from-to)	157-170
Number of pages	14
Journal	Journal of Microelectromechanical Systems
Volume	9
Issue number	2
DOIs	https://doi.org/10.1109/84.846696
State	Published - Jun 2000

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/84.846696

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@article{1f531c9a75984a16b7987c493f400107,

title = "On a tunable bistable MEMS - theory and experiment",

abstract = "A tunable micromechanical bistable system consisting of a long slender micromechanical beam attached to an actuator is introduced. This system is characterized using an analytical model based on the first mode of buckling of the beam. Several examples of possible applications of the system are given, including digital sensing of physical parameters.",

author = "Saif, {M. Taher A.}",

note = "Funding Information: Manuscript received June 18, 1999; revised March 6, 2000. This work was supported by the National Science Foundation CAREER Award NSF ECS 97-34368. Subject Editor, C. J. Kim. The author is with the Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA. Publisher Item Identifier S 1057-7157(00)04855-1.",

year = "2000",

month = jun,

doi = "10.1109/84.846696",

language = "English (US)",

volume = "9",

pages = "157--170",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2",

}

TY - JOUR

T1 - On a tunable bistable MEMS - theory and experiment

AU - Saif, M. Taher A.

N1 - Funding Information: Manuscript received June 18, 1999; revised March 6, 2000. This work was supported by the National Science Foundation CAREER Award NSF ECS 97-34368. Subject Editor, C. J. Kim. The author is with the Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA. Publisher Item Identifier S 1057-7157(00)04855-1.

PY - 2000/6

Y1 - 2000/6

N2 - A tunable micromechanical bistable system consisting of a long slender micromechanical beam attached to an actuator is introduced. This system is characterized using an analytical model based on the first mode of buckling of the beam. Several examples of possible applications of the system are given, including digital sensing of physical parameters.

AB - A tunable micromechanical bistable system consisting of a long slender micromechanical beam attached to an actuator is introduced. This system is characterized using an analytical model based on the first mode of buckling of the beam. Several examples of possible applications of the system are given, including digital sensing of physical parameters.

UR - http://www.scopus.com/inward/record.url?scp=0042874104&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042874104&partnerID=8YFLogxK

U2 - 10.1109/84.846696

DO - 10.1109/84.846696

M3 - Article

AN - SCOPUS:0042874104

SN - 1057-7157

VL - 9

SP - 157

EP - 170

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 2

ER -

On a tunable bistable MEMS - theory and experiment

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