A tunable micromechanical bistable system consisting of a long slender micromechanical beam attached to an actuator is introduced. This system is characterized using an analytical model based on the first mode of buckling of the beam. Several examples of possible applications of the system are given, including digital sensing of physical parameters.
|Original language||English (US)|
|Number of pages||14|
|Journal||Journal of Microelectromechanical Systems|
|State||Published - Jun 2000|
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering